4 Key Benefits of Using Bulk Diaphragm Valves (BDV) in Semiconductor Gas Delivery
Semiconductor fabrication is a complex process that requires precise control and high purity, as any slight deviation or contamination can lead to significant issues. Contamination substantially reduces product yield in semiconductor manufacturing; The killer defects from metal contamination cause reliability problems, as they are often undetected until after the device has been built into an electronic product. Such contamination can come from raw materials, for example, dopants and gases.
Bulk Diaphragm Valves (BDVs) play a crucial role here, controlling the flow of critical inert and process gases and ensuring the smooth operation of semiconductor fabrication.
BDVs work by using a flexible, tied diaphragm to open or close the valve, thus controlling the flow of the media. When the valve is actuated, the diaphragm moves up or down. In the open position, the diaphragm lifts, allowing the media to flow. In the closed position, it seals against a valve seat, stopping the flow. The BDV is a positive retraction diaphragm valve. This engineered feature has reduced the surface area and particle entrapment potential, a possible issue that is inherent in UHP bellows valves.
BDVs are important in the semiconductor industry because they regulate gas flow with high precision. The design of the BDV valve provides superior control of UHP gases under high flow (2.8 Cv), and low-pressure conditions, where absolute purity is essential.
Advantages of BDV – Bulk Diaphragm Valves
Parker Veriflo Bulk Diaphragm Valves (BDV) offer greater precision control and reliability due to its high-quality design. Here are some key advantages offered by the BDVs:
Optimized Performance: Bulk Diaphragm Valves are designed for high purity gas applications, which is crucial in the manufacture of semiconductor devices. The high flow design (2.8 Cv for ?” & ?” ports) is ideal for semiconductor bulk gas delivery (gas laterals), as well as for high-flow gas delivery systems (such as bulk specialty valve manifold boxes (VMB) & gas sticks / process control manifolds).
High Purity: These valves are made from UHP grade 316L SS/PCTFE material, electropolished wetted areas to 10 Ra, leak tested to ≤ 1 X 10-9 scc/sec He, all of which ensure the purity of the gas flow. This makes them ideal for semiconductor gas delivery, where even the smallest impurity can significantly affect the quality of the final product.
Leak Prevention: The design of the BDVs is ideal for leak prevention. The diaphragm forms a seal between the body and the bonnet of the valve, preventing gas from escaping. This not only ensures the safety of the operation but also prevents wastage of expensive specialty gases used in the semiconductor industry. BDV valves are leak tested (inboard test method) to ≤ 1 X 10-9 scc/sec He
Long Service Life: These valves are known for their durability and long service life. They can withstand the harsh conditions often found in semiconductor processes, with operating temperatures up to 150 degrees F. This reduces the need for frequent replacements, saving time and money.
Applications for BDV – Bulk Diaphragm Valves
Bulk Diaphragm Valves are widely used in various applications due to their superior control, high purity, and leak prevention. Here's how they fit into semiconductor applications:
1. Semiconductor Sub-Fab gas lateral systems: BDVs are ideal for high purity inert and other non-toxic or corrosive gas delivery in sub-fab gas lateral systems. These valves ensure precise control and reliable flow in environments where maintaining gas purity is critical.
2. Bulk Specialty Gas Cabinets: In semiconductor fabrication, bulk specialty gas cabinets are used to safely manage gases used in the manufacturing process. Diaphragm Valves are used in these systems to control the flow of gases from the bulk specialty ISO containers to the process equipment. These valves ensure the safety of the operation by preventing any potential gas leaks.
3. Tool Hook-Up: In tool hook-up, which refer to the connections between process equipment and utilities (like gases, chemicals, water, etc.), Diaphragm Valves are used to control and isolate the flow of gases or fluids. This precise control is crucial to ensure the correct operation of the process tools and to allow for easy maintenance or system modifications.
4. Valve Manifold Boxes (VMBs): VMBs are used in semiconductor manufacturing to control the distribution of process gases from a central source to various tools. Diaphragm Valves are used within these boxes to control the flow of gases to different parts of the process. Their high reliability and leak-tightness make them ideal for this application.
Parker Veriflo’s BDV Series Bulk Diaphragm Valves
BDV – Bulk Diaphragm Valves from Parker’s Veriflo Division are optimized for UHP semiconductor gas delivery. These valves are designed to provide precise pressure control in a wide range of applications for semiconductor fabrication.
To learn more about the BDV Series, please visit our web page BDV Series Ultra-high Purity Bulk Diaphragm Valve.
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