The FR1300 Series ultra-high purity, pressure reducing regulator offers high-flow capability with an inlet pressure up to 600 psig and is an excellent choice for point of use bulk and specialty gas applications.
 

FR1300 Series UHP Regulator Features:

• 316L stainless steel body
• Manufactured for ultra-high purity semiconductor gas applications
• Metal-to-metal diaphragm seal
• 10 in. Ra surface finish
• Passivated & Electropolished
• Hastelloy C-22 diaphragm
• Flow capacity: 1.2 Cv
• Flows up to 1200 slpm (42 scfm)

FRN1300 Series UHP Regulator Markets:

• Semiconductor Fab Installations
• Gas Companies

FRN1300 Series UHP Regulator Applications:

• Tool Hook-Up
• "Point of Use" pressure regulation
   

Download Parker Veriflo FR1300 Series UHP Single Stage Pressure Reducing Regulator Datasheet 
 

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