The CMFC-9000 Integrated Coriolis Flow Controller controls liquid and Slurry flows up to 3000 grams per minute to within 1.0% accuracy of the set point, while providing a quick response time of within 2 seconds for consistent control. Mass flow measurement is fluid independent.
 

CMFC-9000 Series Coriolis Flow Controllers Features:

• High Accuracy - Controls flowrate to within 1.0% of set point; ideal for fluid blending and/or dispense applications
• Fast Response 2 seconds (typically < 1 seconds for most applications)
• Broad application range with 2 types of control valves
• Wide range of flow control capability
• All PTFE/PFA wetted part construction compatible with UHP liquid chemicals, DI water and CMP slurries (slurry module with Pt cured Silicone tubing)
• Mass flow measurement accuracy is independent of fluid density and viscosity

CMFC-9000 Series Coriolis Flow Controllers Applications:

• Semiconductor CMP tools suitable for use to precisely control the flow of chemicals and polishing slurries dispensed to the polishing platen; an ideal replacement for peristaltic pump-based delivery systems.
• Cleaning tools for accurate and reliable control in the blending and delivering of cleaning chemistries on post CMP cleaning and related tools.
• Copper plating tools well suited to chemical mixing and dispense applications

CMFC-9000 Series Coriolis Flow Controllers Specifications:

Download CMFC-9000 Series Coriolis Flow Controllers Datasheet 

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