500 Series UHP Stainless Steel Bellows Valve from Parker

What Are Bellows Valves?

Bellows valves are integral components in systems that handle gases and other fluids. A bellows is essentially a flexible, accordion-like component that expands and contracts to allow movement while maintaining a hermetic seal. The bellows is typically made from a durable, corrosion-resistant material like stainless steel, and its design enables it to withstand high pressures and temperatures.

When operated, bellows valves expand or contract to enable the valve to open or close. The bellows design allows for high-flow capacity while maintaining an optimized form factor. Bellows valves effectively control the flow of gases or other fluids within the system. They can be opened or closed to start or stop the flow, or partially opened to regulate the flow rate. The hermetic seal created by the bellows valves ensures that the fluid path is isolated from the atmosphere, preventing contamination and ensuring the purity of the gases. 


500 Series Stainless Steel Bellows Valve from Parker500 Series

The 500 Series manual and pneumatic operated bellows valves are designed with the industry's leading straight through full flow. This allows for maximum gas transfer through the main and lateral lines inside the fabrication facility. Fully functional from vacuum to 320 psig, these bellows valves are versatile for various operating conditions.

Features

500 UHP Series Stainless Steel Bellows Valve Features: 

  • Standard surface finish of 10 micro inch Ra
  • Fully functional from vacuum to 250 psig
  • Serialized and heat code traceable
  • 100% Helium leak tested
  • Optimum purge port location
  • Standard full internal electroplish
  • AOP version available in 1/2” size
  • Vericlean?, Veriflo’s low sulfur high purity 316L Stainless Steel enhances electropolishing, welding, and corrosion resistance

Specifications

500 UHP Series Stainless Steel Bellows Valve Specifications:

Materials of Construction
Wetted 
BodyVeriClean? 316L Stainless Steel 
Tube Ends316L Stainless Steel
Stem316L Stainless Steel
Seat Holder316L Stainless Steel
Bellows Adapter316L Stainless Steel
Bellows321 Stainless Steel
SeatPCTFE
Bonnet GasketNickel
Non-Wetted 
  • Pneumatic
 
Actuator Housing Aluminum
Actuator Adapter 303 Stainless Steel
Actuator Plate Aluminum
Bonnet Brass
Bonnet Adapter 303 Stainless Steel
Bearing Bronze 
Set Screw 316 Stainless Steel
  • Manual
 
Hand Wheel  Aluminum
Bonnet Brass
Bearing Bronze
Functional Performance
Flow Capacity 
UHP504Cv 4.8
UHP506  Cv 17.4
Leak Rate Inboard Test Method
Internal ≤ 1 X 10-9 scc/sec He
External ≤ 1 X 10-10 scc/sec He
Surface Finish 10 micro inch Ra
Operating Conditions
Maximum Pressure 250 psig (17 barg)
Minimum Pressure Vacuum
Maximum Temperature  140°F (60°C)

 

Applications

500 UHP Series Stainless Steel Bellows Valve Applications:

  • Bulk Gas Delivery System
  • Facility Gas Main
  • Facility Gas Lateral

Q&A

Q&A Section with Expand/Collapse Icons

Parker 500 UHP Series Stainless Steel Bellows Valve Q & A

+ What is the 500 UHP Series Bellows Valve?
Parker’s 500 UHP Series comprises manual and pneumatic-operated stainless steel bellows valves designed for ultra-high-purity gas systems. They provide industry-leading straight-through full flow, ideal for semiconductor fabrication gas delivery lines.
+ What pressure range and operating conditions does it support?
These valves function from full vacuum up to 250 psig (approximately 17 barg), with a maximum operating temperature of 60 °C (140 °F).
+ What is the surface finish quality?
The internal surface is electropolished to a high degree, achieving 10 micro-inch Ra, ensuring smooth flow and purity compliance.
+ Are the valves traceable and quality-assured?
Yes—the valves are serialized, heat-code traceable, and undergo full internal electropolishing and helium leak testing for leak integrity.
+ What typical applications suit this valve?

It is commonly deployed in bulk gas delivery systems, facility main or lateral gas lines, and ultra-high-purity gas distribution systems in semiconductor environments.

Downloads

Download Parker Veriflo 500 UHP Series Stainless Steel Bellows Valve Datasheet


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