What Are Bellows Valves?
Bellows valves are integral components in systems that handle gases and other fluids. A bellows is essentially a flexible, accordion-like component that expands and contracts to allow movement while maintaining a hermetic seal. The bellows is typically made from a durable, corrosion-resistant material like stainless steel, and its design enables it to withstand high pressures and temperatures.
When operated, bellows valves expand or contract to enable the valve to open or close. The bellows design allows for high-flow capacity while maintaining an optimized form factor. Bellows valves effectively control the flow of gases or other fluids within the system. They can be opened or closed to start or stop the flow, or partially opened to regulate the flow rate. The hermetic seal created by the bellows valves ensures that the fluid path is isolated from the atmosphere, preventing contamination and ensuring the purity of the gases.
500 Series
The 500 Series manual and pneumatic operated bellows valves are designed with the industry's leading straight through full flow. This allows for maximum gas transfer through the main and lateral lines inside the fabrication facility. Fully functional from vacuum to 320 psig, these bellows valves are versatile for various operating conditions.
Features
500 UHP Series Stainless Steel Bellows Valve Features:
- Standard surface finish of 10 micro inch Ra
- Fully functional from vacuum to 250 psig
- Serialized and heat code traceable
- 100% Helium leak tested
- Optimum purge port location
- Standard full internal electroplish
- AOP version available in 1/2” size
- Vericlean?, Veriflo’s low sulfur high purity 316L Stainless Steel enhances electropolishing, welding, and corrosion resistance
Specifications
500 UHP Series Stainless Steel Bellows Valve Specifications:
| Materials of Construction | |
| Wetted | |
| Body | VeriClean? 316L Stainless Steel |
| Tube Ends | 316L Stainless Steel |
| Stem | 316L Stainless Steel |
| Seat Holder | 316L Stainless Steel |
| Bellows Adapter | 316L Stainless Steel |
| Bellows | 321 Stainless Steel |
| Seat | PCTFE |
| Bonnet Gasket | Nickel |
| Non-Wetted | |
| |
| Actuator Housing | Aluminum |
| Actuator Adapter | 303 Stainless Steel |
| Actuator Plate | Aluminum |
| Bonnet | Brass |
| Bonnet Adapter | 303 Stainless Steel |
| Bearing | Bronze |
| Set Screw | 316 Stainless Steel |
| |
| Hand Wheel | Aluminum |
| Bonnet | Brass |
| Bearing | Bronze |
| Functional Performance | |
| Flow Capacity | |
| UHP504 | Cv 4.8 |
| UHP506 | Cv 17.4 |
| Leak Rate | Inboard Test Method |
| Internal | ≤ 1 X 10-9 scc/sec He |
| External | ≤ 1 X 10-10 scc/sec He |
| Surface Finish | 10 micro inch Ra |
| Operating Conditions | |
| Maximum Pressure | 250 psig (17 barg) |
| Minimum Pressure | Vacuum |
| Maximum Temperature | 140°F (60°C) |
Applications
500 UHP Series Stainless Steel Bellows Valve Applications:
- Bulk Gas Delivery System
- Facility Gas Main
- Facility Gas Lateral
Q&A
Parker 500 UHP Series Stainless Steel Bellows Valve Q & A
It is commonly deployed in bulk gas delivery systems, facility main or lateral gas lines, and ultra-high-purity gas distribution systems in semiconductor environments.
Downloads
Download Parker Veriflo 500 UHP Series Stainless Steel Bellows Valve Datasheet
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