Centura Chamber Pneumatic Manifold Replacement AC-150-2463
Semiconductor fabs can now replace their obsolete pneumatic manifolds with Valin's tool qualified manifolds. Valin engineered a drop-in pneumatic manifold replacement that is a perfect solution for your obsolete chamber pneumatic manifolds 0190-20124, 0190-20148 & 0010-01801 on your aging fleet of Centura and Centura Ultima process tools. The AC-150-2463 pneumatic manifolds come as a complete kit for ease of installation. Fabs can reduce wafer scrap, eliminate air leaks and improve wafer yield with these new pneumatic manifold replacements.
We're so confident that this manifold will improve your wafer yield that we will send you a product to evaluate at no charge for 60 days.
Click here to request POE (Product on Evaluation) order. Stock is available and ready to ship!
"Valin's Pneumatic Manifold Retrofit Kits have been an absolute life saver for us. Since upgrading to Valin's manifold solution, we have had to change out four valves at separate times. Without the ability to shut off the doors one at a time, we would have likely had four separate wafer scraps because of these four maintenance events. However, with this new technology, that hasn't been the case. The solution is truly a home run not only in the hardware, but the procedural materials that instructed us how to install it. Very easy and intuitive."
Dave McGuire, NXP Semiconductors
Video: Valin's Pneumatic EV Manifold Retrofit Solutions
Case Study: Semifab Reduces Wafer Scrap with Pneumatic Manifold Retrofit Kits
Case Study: Semi Fab Eliminates Air Leaks with Easy to Install Manifold Retrofit Kits
Article: Improving Yield through Upgraded Pneumatic Manifolds
Press Release: Valin Corporation Customers See Success with Pneumatic Manifold Retrofit Kits
Blog: Wafer Yield in the Semiconductor Industry
Centura and Centura Ultima Chamber Pneumatic Manifold Replacement for 0190-20124, 0190-20148 & 0010-01801 - Upgrade Benefits:
- Replace entire Manifold in minutes
- Current Manifold difficult to source
- Replace individual valves in less than 5 minutes
- Reduce Tool Downtime
- Eliminate CDA leaks
- Improve performance with larger Cv (.3) and higher flowrate (250 -300 l/min) for faster valve actuation
- Reduce potential of wafer scrap due to leakage
- The power consumption of each coil is 0.55w and a switching time of 8 ms
- Drop in place solution (no holes to tap)
- Units tested and fab approved
- LOTO on/off control valve
- Valves rated to 150 million cycles for AV series valves
Clean, Simple Design
Centura Chamber Pneumatic Replacement Manifolds
Chamber Configurations Available:
- Centura Ultima HDP-CVD - High Density Plasma - Chemical Vapor Deposition (HDP-CVD)
- Centura Poly Etch DPS - Decoupled Plasma Source (DPS)
- Centura 5200 WXZ WCVD
- Centura WxP Tungsten Etch
Need a different configuration? Email our team at manifold@valin.com to discuss.
Centura Chamber Pneumatic Manifold
Valin's AC-150-2463 pneumatic manifold replaces Centura pneumatic manifold part 0190-20124 & 0190-20148.
Centura Ultima Chamber Pneumatic Manifold
Valin's AC-150-2459 pneumatic manifold replaces Centura Ultima pneumatic manifold part 0010-01801.
Spare Valves & Accessories for Centura and Ultima Chamber Pneumatic Manifolds
Valin Ported Exhaust Kit - Dual, Part Number AC-150-2479
The Valin Dual Ported Exhaust kit works with any manifold that includes the AVENITCS AV03 valves. The dual kit changes the local ambient exhaust to a ported exhaust for anything with 2 ambient exhaust positions. Shop Now
Unboxing and Installing a Dual Ported Exhaust Kit to a Centura Chamber Pneumatic Manifold
AVENTICS? Series AV03
The AVENTICS? Series AV03 provides a reliable basis for both compact handling systems and complex automation solutions. Within machine safety, the Series AV03 offers intelligent solutions that significantly reduce your effort in creating a safe design. With the integration of the Fieldbus and I/O-modules of the Series AES, also all requirements for distributed control are available.
AVENTICS 5/2-Directional Valve, Series AV03 - Part Number AC-5VLV-0006
5/2-Directional Valve, Series AV03 - Part Number AC-5VLV-0006
AC-5VLV-0006 5/2-Directional Valve, Series AV03 Diagram
2x3/2-Directional Valve, Series AV03 - Part Number AC-5VLV-0007
AVENTICS 5/2-Directional Valve, Series AV03 - Part Number AC-5VLV-0008
5/2-Directional Valve, Series AV03 - Part Number AC-5VLV-0008
Legris Mini Ball Valve Part Number VLN-0549
Legris Mini Ball Valve
This Parker Legris 2-way ball valve is used as a shut-off for the Compressed Dry Air (CDA) supplied into the Pneumatic Manifolds used on the legacy SEMIFAB tools. For customers who are using traditional hemostats to pinch off the incoming supply line, which isn't easy to do in confined spaces, these 2-way shut-off ball valves are the best solution. These ball valves don't require any mounting, and they can be connected inline to the supply CDA tubing. Shop Now
Have questions?
Contact our team of semiconductor technical specialists at (855) 737-4716, or email our team at manifold@valin.com to learn more.
Valin's drop-in pneumatic manifold replacement is a perfect solution for your obsolete chamber pneumatic manifolds on your aging fleet of Centura and Centura Ultima process tools.